Beilstein J. Nanotechnol.2022,13, 182–191, doi:10.3762/bjnano.13.13
; dissociative ionisation; focused electron beam-induced deposition; molybdenumhexacarbonyl; Introduction
Studies on Mo-based semiconductor materials for the application as thin films with wafer-scale thickness homogeneity [1] and for solar hydrogen production [2] have attracted interest in the last years. For
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Figure 1:
Negative ion yield curves from DEA to Mo(CO)6 in the energy range from about 0–12 eV. From top; for...